First Nano - TCS gas qualification for polysilicon plant EasyTube 3000

 

One of the most important feedstock for crystalline solar cell is polysilicon, which produced from trichloride silane (TCS, SiHCl3). The quality of the polysilicon is closely related to the quality of these gases and should be regularly monitored.

 

EasyTube™ 3000 is designed for growing ultra high purity epitaxial silicon layers on silicon wafers. By using the gas as the process gas for growing the epitaxial film, the quality of those gases is evaluated by checking the deposited epitaxial layer with Fourier Transform Photo Luminescence (FTPL).

 

Advantages:

• Higher yield
• Fast inspection 
• Higher throughput