MKS - Advanced Processing Equipment Components

 

MKS as one of the leading manufacturer on instruments that measure, control, power, monitor and analyze critical parameters of vacuum processes using in semiconductors, display, glass coating etc. We are the authorized dealer in Hong Kong, China and Philippines. 

 

Products include:

 

Category

 

Product

Application

Flow Measurement, Control & Verification

1-009aMass Flow Controller

Mass Flow Meter

 

 

For precision gas flow control for vacuum process

Pressure Measurement

627C e-Baratron Ethernet-Enabled ManometerBaratron® capacitance manometer

 

For pressure measurement in the process chamber and pumping gas lines of vacuum process such as PECVD

photo - Series 925 MicroPirani Vacuum TransducerPressure gauge and controller

Leak Detection

1-009cPICO® helium leak detectors (light weight, only 7.7kg)

 

For helium leak check to locate leak in process chamber

Residual Gas Analysis

 1-009f

For in-situ process monitoring such as PECVD

Vacuum Components

fittingStainless steel fitting

Vacuum valves (with and without heating)

Butterfly valves (for downstream pressure control)

 

General purpose vacuum hardware

Remote Plasma Source

AstronASTRON® Remote Plasma Source

NF3 remote plasma source for cleaning unwanted deposition on the PECVD chamber wall

Ozone generator

SemozonSEMOZON™ ozone gas generators

For wafer surface cleaning and remove the organic materials during the crystalline silicon PV cell production

Power Supplies

Power SupplyDC power supply

RF power supply and matching network

For used in PECVD, plasma edge isolation

 

 

 

 


Data Storage

Photovoltaic

Optical Industry

R & D

Semiconductors

General Accessories