Polyteknik - DC or RF sputtering machine

 

• DC/RF sputtering and CVD deposition processes for development and small to medium scale production of Thin Film PV cells
• Coating on silicon, glass and web samples
• Compact design for room saving
• Residual Gas Analyzer (RGA) for process control
• In-situ thickness monitoring
• Data logging for future analysis
• Receipt control for automatic process
• Substrate heating is an option
• Fixture with tilt and rotation features
• Cleanroom compatible