Invenious - Flat Scanner and Six -Axis Motion Nano-Positioner

 

Invenious provides flat XY scanner to AFM with over 800um scan range and less than 8nm total error to long scan PTR solution.

 

Invenious also provides up to six- axis motion positioner with 10mm range and nanometer resolution for very precision mechanical positioning. It has been widely used in nano-machining for binary optics etching, nano device positioning.