FEI - Conventional EM

FEI Company, one of the world’s leading suppliers of transmission electron microscopes (TEM) and scanning electron microscopes (SEM). With a 60 years history of Electron Microscopy（EM）industry. Innovations in the technology and the integration of electron optics, fine mechanics, microelectronics, computer sciences, and vacuum engineering have kept FEI at the forefront of Electron Microscopy ever since.

Scanning Electron Microscopes Products

Scanning Electron Microscopes - solutions for enhanced performance and analysis. SEMs are used for inspecting topographies of materials with a magnification range that encompasses that of optical microscopy and extends it to the nano scale.

Image	Model	Specification	Description
	Phenom SEM	•Resolution: 30nm(BSE) •Accelerating Voltage：5kv(fixed) •Electron Optical：Long lifetime thermionic source •Automated sample control	•Intuitive touch-screen user interface requires little or no training •Sample loading in less than 30 seconds •Magnification range 24~24,000x •Includes an optical camera for never-lost navigation
	Inspect S50	Resolution • High-vacuum - 3.0nm at 30kV (SE) - 10nm at 3kV (SE) - 4.0nm at 30kV (BSE) • Low-vacuum - 3.0nm at 30kV (SE) - 4.0nm at 30kV (BSE) - < 12nm at 3kV (SE) Accelerating Voltage: 200V – 30kV	•Molecular pump vacuum system •High stability, high brightness tungsten filament electron gun •FEI unique LFD low vacuum secondary electron detector •Based on the Windows XP graphical user interface, easy to use
	Inspect F50	Resolution • High-vacuum - 0.8nm at 30kV (STEM) * - 1.2nm at 30kV (SE) - 2.5nm at 30kV (BSE) * - 3.0nm at 1kV (SE) Accelerating Voltage: 200V – 30kV	•Molecular pump + ion pump vacuum system •High stability, ultra-high brightness field emission filament •Optional FEI unique STEM detector, resolution can be reached at 0.8nm • A large stable beam current (up to 200nA) to ensure fast and accurate EDS, WDS and EBSD analysis
	Quanta X50	Resolution • High vacuum - 3.0nm at 30 kV (SE) - 10.0 nm at 3 kV (SE) • High vacuum with beam deceleration option - 6.2 nm at 3 kV (BD mode* + vCD*) • Low vacuum - 3.0 nm at 30 kV (SE) - 10 nm at 3 kV (SE) • ESEM: 3.0 nm at 30 kV (SE) • 4.0 nm at 30 kV (BSE) •Stage Quanta 250: X=Y=50mm Quanta 450: X=Y=100mm Quanta 650: X=Y=150mm • Accelerating voltage: 200V to 30kV	• Characterize conductive and non-conductive samples with SE and BSE imaging possible in every mode of operation • Enable surface imaging with optional beam deceleration mode to get surface and compositional information from conductive samples • Perform dynamic in situ analysis of diverse samples in their natural state above or below ambient temperatures from - 165 °C to 1500 °C with specialized in situ stages
	Quanta X50 FEG	Resolution • High vacuum - 0.8 nm at 30 kV (STEM)* - 1.0 nm at 30 kV (SE) - 2.5 nm at 30 kV (BSE) - 3.0 nm at 1 kV (SE) • High vacuum with beam deceleration option - 3.0 nm at 1 kV (BD mode* + BSE) - 2.3 nm at 1 kV (BD mode* + ICD) - 3.1 nm at 200 V (BD mode + ICD*) • Low vacuum - 1.4 nm at 30 kV (SE) - 2.5 nm at 30 kV (BSE) - 3.0 nm at 3 kV (SE) • Extended vacuum mode (ESEM) - 1.4 nm at 30 kV (SE) Quanta 250 FEG: X=Y=50mm Quanta 450 FEG: X=Y=100mm Quanta 650 FEG: X=Y=150mm • Accelerating voltage: 200 V to 30 kV	• Only high resolution FEG-SEM with ESEM technology • Characterize conductive and non-conductive samples with SE and BSE imaging possible in every mode of operation •Navigation features include auto navigation montage, double-click stage-movements, drag-to-zoom and other useful features incorporated as standard. •SmartSCANTM technology is smart scanning strategy to reduce noise and provide better data.
	Nova NanoSEM x30	Resolution • High Vacuum - 1.0nm@15kV - 1.8nm@1kV - 0.8nm@30kV(STEM) • Low Vacuum-1.5nm@10kV(Helix detector) - 1.8nm@3kV(Helix detector) • Accelerating voltage: 200V to 30kV • Stage -　Nova NanoSEM 230: X=Y=50mm - Nova NanoSEM 430: X=Y=100mm - Nova NanoSEM 630: X=Y=150mm	The FEI Nova™ NanoSEM line of SEMs provides high-quality nano scale research tools for a variety of applications that involve sample characterization, analysis, prototyping, and S/TEM sample preparation. With a range of models with ESEM technology and two Dual-Beam™ systems.

Transmission Electron Microscopes Products

FEI's market-leading transmission electron microscopes (TEM) feature fully integrated and automated operation for a range of applications requiring ultra-high resolution to sub-Angstrom levels. Magnifications beyond 1,000,000x are attainable with a transmission electron microscope.

Tecnai Spirit	• TEM Line resolution - TWIN 0.20nm / BioTWIN 0.34nm • Maximum eucentric tilt angle - TWIN ±70o / BioTWIN ± 80o • TEM Magnification - TWIN 18x-650kx / BioTWIN 22x-340kx • High tension switching time < 1 min. • Specimen exchange time without switching off high tension and emitter < 30 sec	Next generation microscopy for life sciences. The Tecnai™ Spirit TEM is an easy to use 20 kV to 120 kV transmission electron microscope (TEM) designed to provide high-contrast, high-resolution imaging and analysis in life science applications.
Tecnai G2 20	•Electron source - LaB6 or W emitter • TEM Point resolution(nm) - U-TWIN 0.19/S-TWIN 0.24/TWIN 0.27 • Maximum tilt angle - S-TWIN ±40o /TWIN ± 70o • TEM Magnification - 25x - 1100kx • Accelerating voltage: 20V to 200kV adjustable continuously • Specimen exchange time without switching off high tension and emitter < 30 sec	The Tecnai G2 20 is a highly advanced, state-of-the-art transmission electron microscope with an unrivalled task-oriented user interface. The accessories that may be fitted onto these systems – e.g. STEM, CCD cameras, EDX and EELS detectors, and energy filters – are embedded into the user interface.
Tecnai G2 F20	• Information limit (nm) - U-TWIN 0.12; S-TWIN/X-TWIN 0.14; TWIN 0.16 • TEM point resolution (nm) - U-TWIN 0.19; S-TWIN 0.24; X-TWIN 0.25; TWIN 0.27 • STEM HAADF resolution (nm) - U-TWIN 0.14nm; S-TWIN 0.19nm; X-TWIN 0.18nm; TWIN 0.24nm • Accelerating voltage: 20v to 200kV • Small energy spread (0.7 eV or less) • Schottky field emitter with high maximum beam current (> 100nA) • High probe current (0.5nA or more in 1nm probe) • EDS solid angle (srad) - X-TWIN 0.3sr; S-TWIN/U-TWIN 0.13sr	The Tecnai G2 F20 is a highly advanced, state-of-the-art 200 kV scanning transmission electron microscope (S/TEM) with an unrivalled task-oriented user interface. The accessories that may be fitted onto these systems – e.g. STEM, CCD cameras, EDX and EELS detectors, and energy filters – are embedded into the user interface
Tecnai G2 F30	• Information limit (nm) - U-TWIN 0.10nm； S-TWIN 0.14nm； TWIN 0.15nm • TEM point resolution (nm) - U-TWIN 0.17nm; S-TWIN 0.20nm; TWIN 0.24nm • STEM HAADF resolution (nm) - U-TWIN 0.14nm; S-TWIN 0.19nm; TWIN 0.24nm • Schottky field emitter with high maximum beam current (> 100nA) • High probe current (0.6nA or more in 1nm probe)	• High performance in TEM imaging, STEM imaging and nano analysis • Simultaneous data recording by fully embedding STEM,CCD cameras, EDX detectors, EELS spectrometers and energy filters • Robust routine analysis down to the sub-nanometer • Flexible high tension