MicroSense Probe – Non-contact Capacitance Gauge
MicroSense, previously known as ADE, until the company was sold in November, 2009, we were a subsidiary of KLA-Tencor Corporation, a leading global supplier of semiconductor wafer defect inspection and metrology tools.
Precision Capacitive Position Sensors
Non-contact Position Measurement with High Resolution over Short Ranges
Based on our patented capacitive sensing technology, MicroSense offers the widest range of non-contact capacitive position sensors in the industry, in order to meet your exact application requirements. Sensor performance is optimized for high stability and linearity, or, highest resolution and measurement bandwidth.
Feature:
1. Completely non-contact capacitive position measurement - the most accurate electrical sensing technology available
2. Detection of any conductive, grounded target – surface finish or material has no effect on accuracy
3. Optimized for short measurement ranges –10 micrometers up to 4 millimeters, depending upon sensor size
4. High accuracy, fast response
5. Application: media thickness measurement, Precision stage vibration measurement, Straightness and flatness measurement of precision stages, Precision motor and shaft run out measurement
Gauge model
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| 4800 series | 8800 series | 5800 series | 6800 series | 6360 series |
| 4800 series | Designed for best linearity and stability, the 4800 series is our most versatile all around position sensor |
| 8800 series | Designed for best linearity and stability, with measurement bandwidth up to 20 kHz – ideal for servo system position feedback and fast tool servo applications. Ultra low noise design, sub-nanometer resolution. |
| 5800 series | Designed for high dynamic applications – high resolution with measurement bandwidth up to 100 kHz. Reliably measure even poorly grounded targets such as air bearing spindles and motors |
| 6800 series | Our lowest noise sensor achieves picometer resolution. State-of-the-art design provides high resolution with increased standoff from the sensor to the target. |
| 6360 series | Non-contact, bench top precision thickness measurement gage for CD stampers, DVD stampers and disk media |
Positioning:
Servo system feedback sensor for nano positioners , Position sensor for fast tool servo
Distance and Displacement Measurement:
Dimensional gaging and inspection , Axial shaft displacement measurement
Run Out Measurement:
Precision motor and shaft run out measurement , Spindle metrology and spindle run out measurement , Straightness and flatness measurement of precision stages
Thickness: Magnetic media thickness measurement , Blu-ray disc stamper thickness measurement
Autofocus and Nulling:
Semiconductor wafer surface sensing
Vibration:
Precision stage vibration measurement , Shaft vibration measurement , Feedback sensor factive vibration isolation systems
Measurement Range
± 25 um to ± 1000 um full scale, depending on probe selection
Measurement Resolution
Typical resolution is better than 2 nm (r.m.s.) @ 1 kHz.
Bandwidth
Jumper selectable from: 1 kHz, 5 kHz, 20 kHz, 100 kHz
