First Nano - horizontal diffusion furnace Model Easytube 6000

Solar Cell Application:

• a-Si, mc-Si deposition
• TCO coating :  ZnO, SiO2, TiO2
• p-n Doping
• Annealing
• Anti-reflection coating : SiN, SiO2

 

MEMS Application:

•  p-n doping, diffusion, oxidation, annealing, coating …etc.  ，it can offer batch type or single wafer from 4” to 12” OD wafer

 

CNTs , Nanowires growth:

• CNTs、Si, SiGe, ZnO nanowires

 

First Nano products lines are included:

• PECVD、LPCVD、UHVCVD
• Diffusion Furnace
• Rapid Temperature Processing
• MOCVD, LPE, VPE (for LED、GaN, III-V epitaxal)
• HCl Etching system (specially design to clean the suspectors of MOCVD)
• Gas delivery system and waste gas handling system
• Custom-made quartz-ware manufacturing and repair