Thermo Noran –X-ray Fluorescence Thin Film Thickness / Composition Measurement Tool
- Patent pending optical collimator which enables to X-ray beam size down to 20 ~ 50 um
- Using fiber optics for X-ray collimating, the X-ray intensity is enhanced at least 30 to 100 times comparing with traditional mechanical X-ray collimator，measurement accuracy is improved 10 times and measurement time can be reduced 80%
- Equipped with advanced zoom feature, magnification range is 30 to 300X. It is specially designed for small feature size sample measurement.
- With using Advanced Fundamental Parametric software function, it allows our machines to analyze max. 6 layers thin film thickness and max. 30 different elements, it also save the usage of expensive X-ray calibration standards
- CXR series can be upgraded with FOUP wafer handler
- High precision XYZ stages, travel precision is +/- 5um
- The unique choice for ultra thin film , very small feature size …challenging applications
Major applications :
- PCB (e.g. immersion Au, Lead-free solder …)、IC substrates (e.g. Au/Ni/Cu)、Lead frame ( e.g. Au/Pd/Ni/Cu)、Wafer bumping ( e.g. UBM ), Passive Components, Electroplating sample, Semiconductor
- Optical communication device, Microwave RF device (e.g. thin Au, Pt, Ti, Ni …etc)
CXR series
