Gatan – Sample Preparation System

 

The newest Model Centar Frontior is a computer controlled single platform sample preparation system for automated polishing, including cross section and parallel polishing of IC's and Disk heads for SEM, TEM, SCM , SIMS (backside) and PEM, at wafer, die and package levels. An integrated microscope coupled with a CCD camera and image magnification of up to 9000X in tandem with the proprietary SMPT* (Sub Micron Polishing Technology) enable easy target positioning, definition and process monitoring. The PC based system enables the use of existing process recipes, develop new specific recipes, save images and data, and share all information with other departments or sites. Proprietary image processing, automated target acquisition, edge detection, coupled with Gatan’s online PolishEye* module, and EAC* (Exact Angle Control - +/-0.1deg) unit enable accuracy down to +/-0.1um, In order to fulfill the high precision leveling requirement in wafer front-side delayering, the tip-tilt accuracy of machine X& Y axis is down to 0.003 deg. It enables us to achieve high throughput and unique front-side delayering polishing.