Veeco (Dektak) – Stylus Profiler

 

 

The Dektak® 8 Advanced Development Profiler combines high repeatability, low-force sensor technology, and advanced 3D data analysis for surface characterization of MEMS, semiconductors and other thin/thick films. The system provides 7.5 angstrom, 1 sigma step height repeatability and a vertical range of up to 1mm. Its overhead gantry design enables scan lengths to 200mm, for planarity and flatness measurements. Dektak's exclusive N-Lite low force sensor option offers stylus forces down to 0.03mg, for scratch-free measurement of soft materials. N-Lite also enables the use of super-sharp styli which can characterize sub-micron lines and spaces, while high aspect ratio tips access deep trenches, measure Shallow Trench Isolation (STI) etch depth, and probe deep structures for MEMS research.

 

The Dektak 6M Bench-Top Surface Profiler measures step heights on any surface, with a programmable stylus force down to 1 milligram and a Z-height capability up to 1 millimeter. Its low-inertia sensor delivers extremely accurate step height, surface roughness, and waviness measurements on samples up to 6 inches. Next-generation HAR tips provide high-aspect-ratio readings previously unattainable with a stylus profiler. The Dektak 6M is a convenient, compact, and economical package for MEMS, material science, and semiconductor applications.

 

Veeco Dektak 8 ADP	Veeco Dektak 6m