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Veeco (di) - SPM/AFM |
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The MultiMode Scanning Probe Microscope (SPM) is the world´s best-selling SPM.
It performs the full range of atomic force microscopy (AFM) and scanning
tunneling microscopy (STM) techniques to measure surface characteristics like
topography, elasticity, friction, adhesion, and magnetic/electrical fields.
The short mechanical path length between probe tip and sample enables very
fast scan rates with utmost precision.
The MultiMode PicoForce System
combines innovative, force-measurement features and proven SPM technology to
bring unprecedented accuracy, flexibility, and repeatability to molecular
biology and nanoscale materials research. The system´s MultiMode SPM provides
unlimited extendibility to the PicoForce through a wide variety of automated
SPM-technique image modules. Finally, the handheld PicoAngler tool permits
intuitive "tactile" interpretation of molecule and force interactions via a
revolutionary force-feedback feature.
The Digital Instruments CP-II Scanning Probe Microscope (SPM) provides high
performance and value for material and physical science research. The CP-II
head, designed to accept an on-axis microscope, utilizes patented ScanMaster
closed-loop scan-linearization to image areas of up to 100x100 µm. The system
is designed for ease-of-use with integrated high-magnification color optics
and a motorized Z stage that makes finding features, changing the premounted
tips, and switching samples fast and easy. The system’s complete library of
both standard and advanced image modes, and a host of accessories and hardware
options, guarantee application flexibility and make the CP-II the best
performer of any scientific SPM in its price class.
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Veeco di MultiMode
Veeco di PicoForce
Veeco di CP-II |
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Veeco (Wyko) - Optical Profiler |
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The Wyko NT8000 is simply the most capable optical profiler available, for
rapid measurement of step heights, roughness and surface topography. Veeco's
eighth generation optical profiler provides non-contact 3D measurement from
0.1 nm to 8 millimeters, with sub-nanometer resolution. A unique, internal
reference signal enables self-calibrating accuracy over the entire scan
range. Combined with 100um/sec scan speed and full automation, the NT8000 is
the tool of choice for demanding research and production applications in
materials, metals, MEMS, semiconductors, optics and more.
Fast and
repeatable, the NT1100 provides high resolution 3D surface measurement, from
sub-nanometer roughness to millimeter-high steps. The small-footprint NT1100
offers all the advantages of industry-standard Wyko optical profiling,
including the full Vision®32 analytical software package. Advanced optics
ensure sub-nanometer vertical resolution at all magnifications. The Data
Stitching option adds a motorized stage for high resolution measurements
over a larger field of view. The NT1100 enables accurate, cost-effective
metrology for R&D and production of MEMS, thick films, optics, ceramics, and
advanced materials.
The DMEMS option lets you use your Wyko NT1100 optical profiler to
characterize micro-devices in 3D, as they actuate, for assessment of true
device functionality. The DMEMS system captures a series of 3D measurement
data, generating a video of the sample device in motion. Template-driven
software lets you extract in-plane and out-of-plane dimensions, resonant
frequency, shape/distortion, deflection, and other key device parameters.
DMEMS is the first system to offer both dynamic measurement and static,
white light profiling of rough surfaces and large steps-for complete MEMS
metrology on a single platform.
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Veeco Wyko NT8000
Veeco Wyko NT1100 |
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Veeco (Dektak) - Stylus Profiler |
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The Dektak® 8 Advanced Development Profiler combines high repeatability,
low-force sensor technology, and advanced 3D data analysis for surface
characterization of MEMS, semiconductors and other thin/thick films. The
system provides 7.5 angstrom, 1 sigma step height repeatability and a
vertical range of up to 1mm. Its overhead gantry design enables scan lengths
to 200mm, for planarity and flatness measurements. Dektak's exclusive N-Lite
low force sensor option offers stylus forces down to 0.03mg, for
scratch-free measurement of soft materials. N-Lite also enables the use of
super-sharp styli which can characterize sub-micron lines and spaces, while
high aspect ratio tips access deep trenches, measure Shallow Trench
Isolation (STI) etch depth, and probe deep structures for MEMS research.
The Dektak 6M Bench-Top Surface Profiler measures step heights on any
surface, with a programmable stylus force down to 1 milligram and a Z-height
capability up to 1 millimeter. Its low-inertia sensor delivers extremely
accurate step height, surface roughness, and waviness measurements on
samples up to 6 inches. Next-generation HAR tips provide high-aspect-ratio
readings previously unattainable with a stylus profiler. The Dektak 6M is a
convenient, compact, and economical package for MEMS, material science, and
semiconductor applications.
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Veeco Dektak 8 ADP
Veeco Dektak 6m |
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Imago - 3D Atom Probe Microscope |
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Imago's flagship product, the LEAP® Microscope is an innovative Atom Probe
microscope, boasting the fastest data collection rate, largest field of
view, and largest analysis volumes ever reported for an atom probe.
The
LEAP® Microscope's superior compositional imaging holds significant
potential for addressing the many problems associated with the development
and production of nano-materials such as: Nanowires; Nanotubes; Fullerenes
("bucky balls"); Quantum dots.
The LEAP® Microscope is particularly well suited to materials and metals
analysis for characterizing and understanding: Grain boundary segregation;
Precipitate size, composition and distribution; Nanocyrstallization in
amorphous alloys;
Precipitate vs. bulk composition.
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Imago LEAP |
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4D - Dynamic Interferometer |
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PhaseCam™ lets you produce reliable, accurate, high-resolution results.
Unlike old style phase-shifting interferometers, the PhaseCam™ works by
taking data in a single frame. Data rates are measured in tens of
microseconds so that even large amounts of vibration or turbulence can't
shake the PhaseCam™. And, unlike other techniques that require multiple
cameras or large amounts of tilt, the PhaseCam™ is simple, robust, reliable,
and accurate. The award winning PhaseCam™ is so much faster than old
fashioned "real-time" phase shifting interferometers that it defines the
meaning of "dynamic interferometry." The new PhaseCam™ 4010 now provides
twice the spatial resolution of the original PhaseCam™.
The FizCam™ 1500 is a completely new, high performance, dynamic Fizeau
interferometer system. Incorporating a revolutionary, single camera, high
speed optical phase sensor that makes a wavefront measurement in as little
as 30 microseconds, the FizCam™ 1500 is almost completely insensitive to
vibration and air turbulence. Now, high accuracy Fizeau interferometry can
be used almost anywhere—even on moving parts! Designed from the ground up to
provide the ultimate in performance and value, the FizCam™ 1500 eliminates
bulky and slow phase shifters. With the ability to zoom up to 16x, it is
easy to test a wide range of part sizes. The exclusive double zoom design
provides the highest speed and insensitivity to vibration no matter what
size part you measure. On top of that, your investment in optics is
preserved because the FizCam™ 1500 is compatible with Fizeau accessories
from a wide variety of manufacturers. Setting up your part with the wide
field alignment system takes only a moment. The FizCam™ imaging system has
no rotating ground glass to limit speed and accuracy so you always get
maximum performance. Another advantage is that it only takes the turn of a
knob to measure parts with any reflectivity from 1% to 100%. You never need
accuracy robbing, fragile pellicle beam attenuators to test high
reflectivity parts.
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4D PhaseCam 4010
4D FizCam 1500 |
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AXIC - Optical Thin Film Analyzer & X-ray Fluorescence Thin Film Analyzer (XRF) |
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The patented AXIC TYGER Thin-film Analyzer is a
multi-angle reflectometer that characterizes thin transparent films by
analyzing reflected light from a laser source... and it makes multiple
precise thin-film measurements in seconds. TYGER'S advanced design
incorporates a unique software algorithm and laser optics to measure the
actual film thickness, refractive index and absorption.
The Precision 1000-B® readily analyzes compound thin films utilized in
semiconductor, superconductor, magnetic and optical applications. This fully
automatic system provides rapid composition and thickness analysis of films
in the production environment. In process development, the Precision 1000-B®
is utilized to characterize the effect of variables on the film deposition
process. Once the process is defined, the Precision 1000-B® is utilized as a
quality control monitor to insure the composition and thickness of the
production films.
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AXIC Tyger (left) and Precision 1000-B (right) |
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PPL - Automatic Vision & Laser Measurement System |
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Pacific Precision Laboratories, Inc. (formerly, JMAR
Precision Systems, Inc.) was founded in 1985 with the goal to design and
manufacture precision electromechanical platforms and custom engineered
systems for the disk drive industry. In later years, PPL introduced Optical
Inspection Systems with their proprietary Video-CMM® software for the
microelectronics and disk drive industries.
The Mirage® automatic vision and laser measurement system provides high
accuracy measurement in a compact tabletop model. A typical configuration
may include microscope optics using a two-position precision automatic lens
shuttle. Laser auto focus can be added for high speed, on-the-fly focusing
of the video image. An optional laser probe is available for ultra-precise
Z-axis profiling.
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PPL Mirage |
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Sagitta - Sample Preparation
System |
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The Centar is a computer controlled single platform
sample preparation system for automated polishing, including cross section
and parallel polishing of IC's and Disk heads for SEM, TEM, SCM, and PEM, at
wafer, die and package levels. An integrated microscope coupled with a CCD
camera and image magnification of up to 9000X in tandem with the proprietary
SMPT* (Sub Micron Polishing Technology) enable easy target positioning,
definition and process monitoring. The PC based system enables the use of
existing process recipes, develop new specific recipes, save images and
data, and share all information with other departments or sites. Proprietary
image processing, automated target acquisition, edge detection, coupled with
Sagitta's online PolishEye* module, and EAC* (Exact Angle Control -
+/-0.1deg) unit enable accuracy down to +/-0.1um, high throughput and unique
bevel polishing.
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Sagitta Centar |
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VIC - Leak Detector |
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Vacuum Instrument Corporation (VIC) is the world's
largest company devoted solely to the research, design, manufacture,
distribution, and service of leak detectors and complete leak detection
solutions.
The MS-40 features a breakthrough in design technology combining high-test
port pressure, a large capacity internal mechanical pump and VIC’s unique
mass spectrometer. The MS-40 utilizes a 180-degree deflection dual magnetic
sector mass spectrometer tube with built-in high vacuum ion gauge. Two
long-life, low current filaments are provided. A self-cleaning heated
repeller and automatic closed-loop emission control are at the heart of the
MS-40 leak detector design. Heavy ion traps reduce the need for deionization
of the mass spectrometer tube by an order of magnitude. This makes it at
least four times faster than conventional portable units available today. *
Its speed makes the MS-40 ideal for a wide range of industrial applications.
The mass spectrometer is sensitive to Helium Mass 3 or Mass 4 and is
operator selectable.
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VIC MS-40 |
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CETR -
Universal Nano Micro macro Tribology Tester |
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The key advantages of the newest Model UNMT :
- Multiple testing platform, customer can add on the new accessories for new
applications.
- Up to 8 multiple sensor can be installed
- Multiple force sensors can be ordered, from Nano to Macro level ( 10nN to
1kN). The force sensor is under PC servo control, so, system can measure the
non-flat sample
- The machine can be consisted the upper / lower compartments. Customer can
select auto XYZ axis stage and rotary stage ( vertical or horizontal )
- Each travel axis is controlled by submicron level encoder ( 0.25um / 0.5um
), can be upgraded to 25nm encoder
- Powerful operation software can analysis the signal at 200KHz bandwidth
from max. 16 different sensors.
The possible testing :
friction force ( statics , dynamics ) , scratch test for hardness
measurement , nano-identation test , Adhesion force test , Fatigue test (
multiple axis, tension, stress, twist) , Lubrication test , Environment test
( vacuum , special gas input ) , temp. change ( 40 to 1000 deg C ) ,
humidity ( 0 ~ 100% RH) , Material test ( elasticity , plasticity
,Destructive test
Industrial applications
thin film ( MEMS, BioMEMS) , Wafer Fab., data storage media, magnetic head ,
automotive components, micro-electronics, connectors
, Lubrication , Additives , Polymers, Elastomers, Paper, Fabric
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CETR UNMT |
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Herzan - Vibration Isolation
System |
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Herzan provides concrete solutions for vibration and noise
problems.
Desktop Isolation System is the
most popular desktop system. It offers excellent performance at a modest
price. The DT-A model is ideal for those applications where equipment is
continually added and removed from the system or when the equipment mounted
on the system is moving across the top surface, such as translation stages.
Acoustic Enclosure
provides a solution for ultra-sensitive equipment. Whether coupled with
vibration isolation systems or used independently, the AEK provides an
extremely quite environment. The interior consists of eleven layers of
various sound-damping materials. This ensures the ultimate acoustic
isolation and absorption over a wide range of frequencies. The front cover
lifts easily up and out of the way, so that access to the instrument is
straightforward.
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Herzan DT-8060A
Herzan AEK |
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