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Veeco (di) - SPM/AFM |
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The Dimension 3100 Scanning Probe Microscope (SPM) utilizes automated atomic
force microscopy (AFM) and scanning tunneling microscopy (STM) techniques to
measure surface characteristics for semiconductor wafers, lithography masks,
magnetic media, CDs/DVDs, biomaterials, optics, and other samples up to 200
mm in diameter. Its laser spot alignment system and the ability to change
scanning techniques without tools guarantee flexibility, ease of use, and
high product throughput.
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Veeco di Dimension 3100 |
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Veeco (Wyko) - Optical Profiler |
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The Wyko HD8100 optical profiler provides fast, non-contact characterization
of magnetic thin-film heads, including pole-tip recession (PTR) and ABS
flatness. New ESD features meet the most stringent static dissipation
requirements for safe GMR and TMR head measurement. The gauge capable HD8100
features self-calibration to an internal reference signal and outstanding
vibration isolation. Template-driven analysis software ensures fast PTR
analysis on complex, next-generation slider designs.
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Veeco Wyko HD 8100 |
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Veeco (Dektak) - Stylus Profiler |
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The Dektak® 8 Advanced Development Profiler combines high repeatability,
low-force sensor technology, and advanced 3D data analysis for surface
characterization of MEMS, semiconductors and other thin/thick films. The
system provides 7.5 angstrom, 1 sigma step height repeatability and a
vertical range of up to 1mm. Its overhead gantry design enables scan lengths
to 200mm, for planarity and flatness measurements. Dektak's exclusive N-Lite
low force sensor option offers stylus forces down to 0.03mg, for
scratch-free measurement of soft materials. N-Lite also enables the use of
super-sharp styli which can characterize sub-micron lines and spaces, while
high aspect ratio tips access deep trenches, measure Shallow Trench
Isolation (STI) etch depth, and probe deep structures for MEMS research.
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Veeco Dektak 8 ADP |
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Imago - 3D Atom Probe Microscope |
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Imago's flagship product, the LEAP® Microscope is an innovative Atom Probe
microscope, boasting the fastest data collection rate, largest field of
view, and largest analysis volumes ever reported for an atom probe.
Fierce
competition in the magnetic storage industry has focused on the reduction of
device form factors. Disk-drive read heads use thin films whose surfaces -
ideally atomically smooth - are exceptionally difficult to analyze.
Interface attributes - roughness, composition chemistry, and impurities -
are critical to performance. The Imago LEAP® Microscope
enables engineers to better understand film structure, especially at
materials interfaces, so film behaviors can be accurately characterized.
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Imago LEAP |
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4D - Dynamic Interferometer |
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The high speed capability
of WaveCam™ is perfect for high throughput testing of small optical
components. WaveCam™ works with a wide variety of wavelengths for nearly
every application. Whether you are testing the next generation of 405 nm,
high N.A., DVD pick up heads or setting up a line for 100% high-throughput
production testing, WaveCam™ is the perfect solution.
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4D WaveCam 1000 |
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MRS - Media Certifier |
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Magnetic Recording Solutions, Inc. also known as MRS was
founded in 1997 to set a new standard of performance and productivity in
production oriented Automatic Test Equipment for the Data Storage industry.
The MRS2000 is a multi-function 100 MHz rigid disk
tester. It incorporates an all-new design architecture that features:
Analog/Digital technology for glide testing; Spiral or step-and-repeat
certification; Windows NT-based software; QA-level testing and production.
MRS pioneered the first certifier upgrade concept for
KOMAG in 1997. Through electronic and software certification upgrades,
KOMAG's MG150 - 16MHz machine was brought to 100 MHz capability. Currently
MRS offers a wide range of complete upgrades for MG250/MG250A.
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MRS MRS2000
MRS MRS2500 |
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Gatan (Sagitta) - Sample Preparation System |
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The newest Model Centar Frontior is a computer controlled single
platform sample preparation system for automated polishing, including
cross section and parallel polishing of IC's and Disk heads for SEM,
TEM, SCM , SIMS (backside) and PEM, at wafer, die and package levels. An
integrated microscope coupled with a CCD camera and image magnification
of up to 9000X in tandem with the proprietary SMPT* (Sub Micron
Polishing Technology) enable easy target positioning, definition and
process monitoring. The PC based system enables the use of existing
process recipes, develop new specific recipes, save images and data, and
share all information with other departments or sites. Proprietary image
processing, automated target acquisition, edge detection, coupled with
Sagitta's online PolishEye* module, and EAC* (Exact Angle Control -
+/-0.1deg) unit enable accuracy down to +/-0.1um, In order to fulfill
the high precision leveling requirement in wafer front-side delayering,
the tip-tilt accuracy of machine X& Y axis is down to 0.003 deg. It
enables us to achieve high throughput and unique front-side delayering
polishing.
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Gatan (Sagitta) |
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Schmitt - Texture Measurement System |
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The control of surface microroughness on a hard disk is critical for
manufacturers. The TMS 2000-RC from Schmitt Measurement Systems more than
meets this challenge and several versions of this device are available.
Schmittt revolutionized disk manufacturing technology by providing the
fastest, most accurate, non-contact texture measurement system in the world — laser technology of the future available today.
The TMS 2000-RC provides fast, accurate, repeatable microroughness
measurements for computer hard disk manufacturers. The system quadruples
production throughput, compared to other testing devices.
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Schmitt TMC 2000-RC |
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Shb - Magnetic Measurement System |
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Shb Instruments has been producing a line of industry-leading Magnetic Measurement Systems since 1976. The Models MESA and 110 are the culmination of two decades of research and development. They feature real time measurements with field strengths up to 15,000 Oe (1.5 Tesla). They have unprecedented sensitivity and repeatability, combined with the ability to handle an extremely wide range of sample sizes -- from below 10 to 200 mm in diameter. This latest generation instrument is fully computer controlled and capable of displaying and measuring hysteresis (BH) loops, magnetoresistance (MR/GMR), and magnetostriction. When equipped with the new Shb Instruments patented TripleBobbin pickup assemblies, precise, repeatable measurements can be made on ultra-thin films.
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Shb MESA
Shb 110 |
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ADE - Non-Contact Displacement Gage |
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ADE Technologies dimensional gaging systems provide high-resolution
non-contact measurement solutions.
Model 4810 gaging module is a stand-alone, non-contact displacement
measurement gage with an analog display of probe displacement on the front
panel. Operating on the principle of capacitance, the 4810 offers
unparalleled resolution (as little as 0.050 nm) , major applications : metal
thickness measurement, spindle runout measurement …etc.
Model 5810 gaging module can offer up to 100K Hz data processing bandwidth,
specially design for ultra high speed spindle runout measurement, flatness
testing, optical component alignment …etc.
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ADE Model 4810 |
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ADE - Wafer & Disk
Mapper System |
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The S/V300 Wafer Mapping System rapidly and automatically
creates a map of the magnetic properties of entire wafers or coupons made in
conjunction with head wafers used to fabricate advanced heads or MRAM
wafers. The S/V300 Wafer Mapping System is available both as a low-cost
manual-loading tool for use in development or limited-production
environments and also as a fully-automated tool for use in volume
production. Its unique ability to measure at both high fields and low
fields, while providing very fine resolution, makes it a powerful diagnostic
tool.
The M2 DiskMapper quickly determines the
uniformity of magnetic properties immediately after sputtering, offering
more rapid feedback for process control. The system can simultaneously read
both sides of the disk while capturing 192 data points in less than one
minute. The M2 DiskMapper will quickly and accurately map the remanence
thickness product, Mrt, remanence coercivity, Hr, and coercive squareness,
S*.
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ADE S/V300 (left) & M2 (right) |
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ADE - Kerr Magnetometer |
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ADE Magnetics is introducing its new Polar Kerr system
featuring the most important factors of measurement: High field up to 2.5
Tesla, high sensitivity and impeccable stability of magnetic measurements.
The Polar Kerr was designed to satisfy the technical need for characterizing
the new perpendicular media. The Polar Kerr System is able to rapidly and
automatically generate a map of the magnetic properties of the entire disk.
This permits rapid process feedback early to avoid adding expense to disks
that may have poor yields. It also provides rapid feedback to the
fabrication process, allowing users to make adjustments to the process to
improve overall yield.
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ADE Polar Kerr |
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CETR - Tribometer |
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For the magnetic and magneto optical disk drive industry, CETR manufactures
two different types of tribology testers that are the most advanced of its
kind. They are known as:
Olympus HDI Test System is designed to perform highly accurate and
effective in-situ component level evaluation of the tribological performance
of magnetic and magneto-optical disks and heads. The system is ideal for QC,
production and R&D testing.
The Micro-Tribometer (UMT) is a precision tribometer for testing of rigid
and flexible magnetic and magneto optical media.
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CETR Olympus (left) & UMT (right) |
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III - Magnetometer |
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Innovative Instrumentation Incorporated was founded in 1987 to provide
non-destructive magnetic characterization equipment for the magnetic
recording industry.
In response to industry needs for quicker, more
extensive, and more automated measurements, a new instrument, the FAST RMM,
was introduced in the summer of 1999. This is a cassette loaded tool, as
much as 50 times faster then the RMM, for fast accurate production control
of thin film media.
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III Fast RMM |
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PPL - Automatic Vision & Laser Measurement System |
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Pacific Precision Laboratories, Inc. (formerly, JMAR
Precision Systems, Inc.) was founded in 1985 with the goal to design and
manufacture precision electromechanical platforms and custom engineered
systems for the disk drive industry. In later years, PPL introduced Optical
Inspection Systems with their proprietary Video-CMM® software for the
microelectronics and disk drive industries.
The Mirage® automatic vision and laser measurement system
provides high accuracy measurement in a compact tabletop model. A typical
configuration may include microscope optics using a two-position precision
automatic lens shuttle. Laser auto focus can be added for high speed,
on-the-fly focusing of the video image. An optional laser probe is available
for ultra-precise Z-axis profiling.
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PPL Mirage |
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MicroPhysics - Magnetic Disc Tester, Tape Head Tester & Fly Height Tester |
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MicroPhysics introduces the Flying Height Tester (FHT) and Disk Head
Tester-2 (DHT-2). The FHT uses a new method of interferometry
(patent-pending) to burst through the sub 10 nm measurement barrier with
great accuracy and no need for retract calibration. The DHT-2 uses fully
digital parametric measurements for excellent accuracy in a cost-effective
package designed for tomorrow's high TPI requirements.
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 MicroPhysics FHT (left) & DHT-3 (right) |
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VIC - Leak Detector |
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Vacuum Instrument Corporation (VIC) is the world's largest company devoted
solely to the research, design, manufacture, distribution, and service of
leak detectors and complete leak detection solutions.
The MS-40 features a
breakthrough in design technology combining high-test port pressure, a large
capacity internal mechanical pump and VIC’s unique mass spectrometer. The
MS-40 utilizes a 180-degree deflection dual magnetic sector mass
spectrometer tube with built-in high vacuum ion gauge. Two long-life, low
current filaments are provided. A self-cleaning heated repeller and
automatic closed-loop emission control are at the heart of the MS-40 leak
detector design. Heavy ion traps reduce the need for deionization of the
mass spectrometer tube by an order of magnitude. This makes it at least four
times faster than conventional portable units available today. * Its speed
makes the MS-40 ideal for a wide range of industrial applications. The mass
spectrometer is sensitive to Helium Mass 3 or Mass 4 and is operator
selectable.
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VIC MS-40 |
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n&k Thin Film Metrology System - South East Asia |
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n&k Technology, Inc., of Santa Clara, California, manufactures advanced metrology tools for semiconductor,
photomask, flat panel display, and data storage industries. The company's high resolution optical metrology
systems are used for film thickness, n and k, phase shift, trench depth, CD and profile measurements.
The core technology is based on DUV-Vis-NIR broadband spectrophotometry with patented reflective optics,
in conjunction with the Forouhi-Bloomer dispersion equations and Rigorous Coupled Wave Analysis. n&k Technology”¦s systems,
ranging from table-top to fully automated, are field-proven, production-worthy, fast, accurate, and non-destructive,
and will enable users to characterize virtually any combination of thin films, substrates, and structures.
n&k 3000
Fully Automated, High Resolution, High Throughput Metrology System for Patterned and Unpatterned Wafers.
The n&k 3000 encompasses configurations for 200 mm (8"), 150 mm (6"), 127 mm (5"), 100 mm (4"), and 50 mm (2") wafers.
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n&k 3000 |
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Herzan - Vibration Isolation
System |
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| Herzan provides concrete solutions for vibration and noise
problems.
Desktop
Active Vibration Isolation System: The inherent stiffness of the TS
system imparts excellent directional and positional stability while
minimizing settling time. In addition, the TS system isolates all six
degrees of freedom, ensuring a stable measuring environment. This active
vibration isolation system provides isolation beginning at 0.7 Hz. Modular High
Load Capacity System: Isolates in all six degrees of freedom; Lack of
low-frequency resonance means much better performance than passive systems;
Active isolation range: 1 - 1000 Hz Passive isolation beyond 1000 Hz; Low
profile is ideal for retrofit and height sensitive applications; Inherent
stiffness of system imparts excellent directional and positional stability;
Turn-key installation; Active isolation can be switched on and off via
remote control. Applications include SEM/TEM, SPM, AFM, UHV applications,
wafer production, interferometers, process, and metrology. Modular Active
Vibration Isolation System: AVI-400 low profile modular system consists
of a minimum of two modules and a separate controller. Each module supports
880 lbs. Module length can be adjusted for specific applications.
Applications include precision instruments such as coordinate measuring
machines, UHV-SPM, SEM and TEM. The inherent stiffness of the AVI-400
imparts excellent directional and positional stability. The lack of a low
frequency resonance means much better performance than with passive systems.
The inherent stiffness of the AVI-400 imparts excellent directional and
positional stability. The AVI-400 isolates all six degrees of freedom.
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Herzan TS-150
Herzan TS-200M
Herzan AVI-400 |
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Thermo NORAN - X-Ray Thickness & Coposition
Measurement System |
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Patent
pending optical collimator which enables to X-ray beam size down to 20 ~
50 um
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Using fiber optics for X-ray collimating, the X-ray intensity is
enhanced at least 30 to 100 times comparing with traditional mechanical
X-ray collimator，measurement
accuracy is improved 10 times and measurement time can be reduced 80%
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Equipped
with advanced zoom feature, magnification range is 30 to 300X. It is
specially designed for small feature size sample measurement.
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With using
Advanced Fundamental Parametric software function, it allows our
machines to analyze max. 6 layers thin film thickness and max. 30
different elements, it also save the usage of expensive X-ray
calibration standards
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CXR series
can be upgraded with FOUP wafer handler
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High
precision XYZ stages, travel precision is +/- 5um
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The unique
choice for ultra thin film , very small feature size …challenging applications
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Major
applications :
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PCB (e.g. immersion Au, Lead-free solder …)、IC
substrates (e.g Au/Ni/Cu)、Lead
frame ( e.g. Au/Pd/Ni/Cu)、Wafer
bumping ( e.g. UBM ), Passive Components, Electroplating sample,
Semiconductor …
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Optical communication device, Microwave RF device
(e.g. thin Au, Pt, Ti, Ni …etc)
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Model VXR
CXR Series |
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