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Veeco (Wyko) - Optical Profiler |
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Fast and repeatable, the NT1100 provides high resolution 3D surface
measurement, from sub-nanometer roughness to millimeter-high steps. The
small-footprint NT1100 offers all the advantages of industry-standard Wyko
optical profiling, including the full Vision®32 analytical
software package. Advanced optics ensure sub-nanometer vertical resolution
at all magnificationsy. The Data Stitching option adds a motorized stage for
high resolution measurements over a larger field of view. The NT1100 enables
accurate, cost-effective metrology for R&D and production of MEMS, thick
films, optics, ceramics, and advanced materials.
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Veeco Wyko NT1100 |
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4D - Dynamic Interferometer |
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Performing precision interferometric testing on large optical components or
complex optical systems may be impossible due to vibration or air
turbulence. Using so called "real-time" phase measuring interferometers
often turns out to be a hit or miss proposition. The 4D Technology PhaseCam™
is the perfect solution! In fact, PhaseCam™ makes it easy to take high
quality, interferometric measurements on components that are mounted on
separate, widely spaced, un-isolated optical tables. In addition, the high
speed capability of PhaseCam™ makes it easy to average out the effects of
air turbulence. PhaseCam™ quickly pays for itself by greatly reducing
testing cycle time and improving throughput. You no longer have to sacrifice
accuracy in challenging environments.
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4D PhaseCam 4010 |
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AXIC - Optical Thin Film Analyzer & X-ray Fluorescence Thin Film Analyzer (XRF) |
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The patented AXIC TYGER Thin-film Analyzer is a
multi-angle reflectometer that characterizes thin transparent films by
analyzing reflected light from a laser source... and it makes multiple
precise thin-film measurements in seconds. TYGER'S advanced design
incorporates a unique software algorithm and laser optics to measure the
actual film thickness, refractive index and absorption. The Precision 1000-B® readily analyzes compound thin
films utilized in semiconductor, superconductor, magnetic and optical
applications. This fully automatic system provides rapid composition and
thickness analysis of films in the production environment. In process
development, the Precision 1000-B® is utilized to characterize the effect of
variables on the film deposition process. Once the process is defined, the
Precision 1000-B® is utilized as a quality control monitor to insure the
composition and thickness of the production films.
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AXIC Tyger (left) and Precision 1000-B (right) |
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Filmetrics -
Tabletop Type Thin Film Measurement Systems |
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FILMETRICS can measure
the thickness, n, k values and roughness up to 4 layers thin film stacks
within seconds. Example layers : Vicually any smooth, translucent, or
lightly absorbing film may be measured.
Semiconductor applications : Photo resist, SiO2, SiNx …
LCD applications : Cell gaps，ITO , Polyimide …
Optical application : hard coating , anti-reflection coating , Filters …
Easy to use , Fast , Accurate, Portable and Low Cost ! Filmetrics Corp.
offer different models for selections :
F20 : It is the most popular model. The machine have wide wavelength
range from selection. i.e. 220 nm to 1700 nm。The max. measurable thin
film thickness is 450um, the min. measureable thickness is 30A，
precision is 1A゜。
F30 The model can be installed in the quartz view-port of any vacuum
deposition machine ( e.g. MOCVD, sputtering machine …etc ) or etching
equipment for real time monitoring the thin film growth rate or etching
rate , film thickness & n , k value. The measurements can be taken in
fixed time interval or at fixed wavelength. Customer can upgrade the
machine with up to three fiber optics for monitoring three deposition
machines sequentially. UV operation wavelength is an option.
F40: The model can be integrated with any commercial available
microscope and allow the measurement spot size is down to 5um ( i.e.
100X objective lens) The tool is very good for film thickness
measurement in very small feature size.
F50: The model can provide the automatic stages for three dimensions
thin film thickness mapping. The sample size can be 8”OD, 12” OD wafer
or up to 18” x 18”square.
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Filmetrics F20
Filmetrics F30
Filmetrics F40
Filmetrics 50 |
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Matrix - X-ray Fluorescence Film Thickness & Composition Analysis System (XRF) |
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Matrix Metrologies is a supplier of film measurement
equipment and services used to determine the thickness and composition of
metal depositions commonly employed in the metal finishing and
microelectronics industries.
Compact 5 is a universal X-ray coating thickness
measurement and material analysis system designed for the inspection of
electronic components, PCB's and other precision metal finishing
applications.
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Matrix Compact5 |
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Schmitt - Texture Measurement
System |
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Texture Measurement System for glass samples. The TMS
2000 DUV-RC machine provides fast, accurate, repeatable microroughness
measurement of all glass surfaces. The SMS system quaddruples factory
throughput compared to other testing devices.
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Schmitt TMS 2000 DUV-RC |
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SPTS - Photothermal
Common-path Interferometer |
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Stanford Photo-Thermal Solutions (SPTS) was founded in
November 2002 to build a business in the field of optical equipment R&D,
manufacturing of novel optical systems and consulting in various issues
associated with optical materials. Photo-thermal Common-path Interferometer
(PCI) technology is in the focus of our current activity.
It belongs to a class of pump/probe thermal lens
instruments which are used to detect the very weak phase distortions of a
probe beam which are introduced in a material under test by the absorption
of a pump laser. The original motivation for the instrument was to study
induced absorption effects and optical damage in nonlinear optical crystals.
The use of two lasers, one laser to introduce the absorption, and the second
laser to monitor this absorption is the key element of the original design.
The instrument detects the
thermal effect of absorption, insensitive to scattering, capable of 2D
or 3D mapping of absorption patterns. It can be used to monitor induced
absorption of gray tracks, laser-induced transparency (bleaching),
initial stages of optical damage, etc.
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SPTS PCI
 
SPTS PCI-02 with 2 pump ports
(left) and PCI-03 with 1 pump port (right) |
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VIC - Leak Detector |
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Vacuum Instrument Corporation (VIC) is the world's
largest company devoted solely to the research, design, manufacture,
distribution, and service of leak detectors and complete leak detection
solutions.
The MS-40 features a breakthrough in design technology combining high-test
port pressure, a large capacity internal mechanical pump and VIC’s unique
mass spectrometer. The MS-40 utilizes a 180-degree deflection dual magnetic
sector mass spectrometer tube with built-in high vacuum ion gauge. Two
long-life, low current filaments are provided. A self-cleaning heated
repeller and automatic closed-loop emission control are at the heart of the
MS-40 leak detector design. Heavy ion traps reduce the need for deionization
of the mass spectrometer tube by an order of magnitude. This makes it at
least four times faster than conventional portable units available today. *
Its speed makes the MS-40 ideal for a wide range of industrial applications.
The mass spectrometer is sensitive to Helium Mass 3 or Mass 4 and is
operator selectable.
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VIC MS-40 |
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Herzan - Vibration Isolation
System |
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Herzan provides concrete solutions for vibration and
noise problems. The HOS systems are specifically
designed for applications requiring heavy loading conditions. The HOS system
consists of a steel honeycomb benchtop mounted on a high performance
isolation system. Steel honeycomb core has an excellent stiffness to weight
ratio. It offers additional stiffness and rigidity over the aluminum core,
with a minimum weight penalty.
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Herzan HOS |
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