Semiconductor Products
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Strasbaugh - CMP, Wafer Backgrinder, Prime Wafer Polisher  
Strasbaugh has designed and manufactured precision surfacing systems and solutions. Our products and processes are used throughout the world in semiconductor fabs, optical labs, fiber optics facilities and other precision manufacturing environments. Engineered with common sense and innovation, every Strasbaugh product deliver precise, reliable results.

With the very latest CMP technologies built in, Strasbaugh nTegrity (6DS-SP) Planarizer makes low cost, high yield CMP productivity a reality. Features are: Zone Back Pressure; Advanced ViPRR Carrier Systems; Endpoint Detection; HydroLift Load Station
Today, over 300 production-proven nTegrity systems are being used throughout the world.

 

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Strasbaugh 6DS-SP
 
Tru-Si - Atmospheric Downstream Plasma (ADP)  
Tru-Si Technologies, Inc. provides atmospheric downstream plasma (ADP) processing equipment to the semiconductor industry in order to meet increasing wireless, portable, networking, and internet market demands for smaller, thinner, cheaper, and more integrated electronic devices. The equipment business is focused on providing total thinning solutions for chip makers.

Tru-Si provides atmospheric downstream plasma (ADP) gas etching equipment, and the handling technology to enable flexible integration of advanced silicon wafer thinning processes.

This dry etching process injects the reactant gas, typically CF4, through an argon arc plasma to break it down to its constituent atoms. As these atoms filter through air at atmospheric pressure, they become deionized, and unwanted atoms react with the air, becoming inert. The result is an efficient dry chemical etch without ion damage.

 

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Tru-Si ADP

 

Contrade - Wafer Cleaner  
The Corwet® Single Wafer Cleaners are stand-alone tools with horizontal wafer processing for 2" up to 300mm wafers featuring simultaneous treatment of top- and bottom side of wafers.

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