CETR is the worldwide leading
tribology equipment manufacturer, their most updated model eCP-4 is
worldwide unique table-top type CMP machine which can operate both CMP &
eCMP mode. The machine can widely use for research & development of CMP
, eCMP processes and the related consumables.
The computerized real-time motor-control and data-acquisition allows for
a repeatable CMP process with crucial process parameters monitored and
analyzed in-situ, real-time:
1.
Dynamic coefficient of friction
between both wafer-pad and conditioner- pad, changes ofwhich allow for
evaluation of material
removal rate
and
non-uniformity
of polishing,
2. in-situ
monitoring of current and voltage
during eCMP mode,
3.
energy and peaks of contact high-frequency acoustic
emission, which allow for detectionevaluation of
polishing intensity
and detection of
micro-scratches
and
delamination,
4. process
temperature
in the slurry and on the pad,
5.
pad wear
during conditioning and/or polishing