DIAMANTA vacuum system is designed for the deposition of wear resistant diamond-like carbon (DLC) coatings on silicon and germanium substrates. These DLC coatings are antireflective in IR range of 3-5 µm as well as in the 7-14 µm range. The deposition method is a plasma enhanced chemical deposition of carbon from the gas phase stimulated by plasma of an ion-beam source. IR optic products are often used in the most extreme operating conditions, where an AR coating is used in combination with a DLC coating on the front side of external lenses.
To be used in:
FEATURES :
TECHNOLOGICAL DEVICES:
| Maximum substrate size | 370х420 mm |
| Maximum coating thickness uniformity | ± 3,0% |
| Maximum quantity of substrates of 30 mm diameter per one run | 116 pcs |
| Ultimate residual pressure in the clean vacuum chamber | 4,5х10-4 Pа |
| Coating control | Single wave optical monitoring system |
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