Excellent in accuracy, stability and functionality, ET4000 is a fully automatic, most appropriate for measurement of micro figure, step height and roughness of FPD, wafers, hard disks, and other nano-order application. ET4000 series can be selected from a number of models according to applications.
| Max. sample size | 210 × 210 mm to 300 × 400 mm |
|---|---|
| Repeatability | 1 σ within 0.5 nm |
| Measuring range | Z: 100 μm X: 100 mm (Y stroke: 150 to 400 mm) |
| Resolution | Z: 0.1 nm X: 0.01 μm |
| Measuring force | 0.5 μN to 500 μN |
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