The EVG101 resist processing system, which is fully compatible with EVG´s automated systems, performs R&D-type processes on a single chamber design. A compact layout with small footprint allows the user semi-automated processing of wafers on an industrial level for the development of new devices or processes.
| Available modules |
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| Spin coat / OmniSpray® / develop |
| Dispense options |
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| Various resist despense pumps to cover a wide range of viscosities up to 52000 cP |
| Liquid priming / pre-wet / bowl wash |
| Edge bead removal (EBR) / back-side rinse (BSR) |
| Constant pressure dispense systems / syringe dispense system |
| Smart process control & data analysis features (framework SW platform) |
|---|
| Integrated analysis features for process and machine control |
| Parallel task / queueing task processing feature |
| Equipment and process performance tracking feature |
| Smart handling features |
| Occurences & alarms analysis / smart maintenance management & tracking |
| Wafer diameter (substrate size) |
|---|
| Up to 300 mm |
| Spin coat module – spinner parameter |
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| Spin speed: up to 10 k rpm |
| Acceleration speed: up to 10 k rpm |
| Spray coat module – spray generation |
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| Ultrasonic atomization nozzle / high-viscosity nozzle |
| Develop module – dispense options |
|---|
| Puddle development / spray development |
| Additional module options |
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| Pre-alignment: mechanical |
| System control |
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| Operations system: Windows |
| File sharing & back-up solution / unlimited no. recipes & parameters / offline recipe editor |
| Flexible process flow definition / easy drag and drop recipe programming |
| Parallel processing of multiple jobs / real-time remote access, diagnostics & troubleshooting |
| Multi-language user GUI & support: CN, DE, FR, IT, JP, KR |
By joining hands and leveraging cutting-edge technologies, we develop innovative solutions to drive societal progress and shape a better future.
With deep expertise and extensive experience, we deliver precise and efficient solutions to ensure every project meets the highest standards.
We integrate cutting-edge technology with continuous innovation to develop breakthrough solutions that drive industry progress and create lasting value for our clients.
We offer round-the-clock premium support services, ensuring rapid response and efficient problem resolution, allowing you to focus on your core business without worries.
