Designed as a fully modular platform, the EVG150 provides automated spin/spray/develop processes with high throughput. A new ultra-compact design with footprint < 3 m2 and redesigned modules enables easy access of individual chambers as well as the robot area. To minimize downtime, single modules can be serviced while the remaining system can be kept up and running. The system features four wet processing modules and up to 20 bake/chill units. Outstanding throughput values for real-life processes can be achieved by using a high-speed, high-accuracy robot and advanced scheduler algorithms. Even though the system exhibits a very compact design, up to 12 pumps and resist bottles can be installed inside the main frame. The EVG150 guarantees highly uniform coats ranging from demanding thick resist applications down to sub-micron layers.
Wafers with high topography can be uniformly coated by EVG’s proprietary OmniSpray ultrasonic atomization technology, where traditional coating encounters limitations. Up to four XY spray coat modules can be installed in the system, which allows unrivalled spray coating throughput.
Versatile combinations of multi-functional modules provide great opportunities in many fields of application like MEMS, image sensors, advanced packaging, RF, 5G, 3D sensing, photonics, automotive and power electronics manufacturing.
| Wafer diameter (substrate size) |
|---|
| up to 200 mm |
| Available modules |
|---|
| Spin coat / OmniSpray® / Develop |
| Bake / Chill / Vapor Prime |
| Wafer handling options |
|---|
| Double EE / edge handling |
| Bowed / warped / thin wafer handling |
| Dispense options |
|---|
| Various resist dispense pumps to cover a wide range of viscosities up to 52000 cP |
| Constant pressure dispense systems |
| EBR / BSR / pre-wet / liquid priming |
By joining hands and leveraging cutting-edge technologies, we develop innovative solutions to drive societal progress and shape a better future.
With deep expertise and extensive experience, we deliver precise and efficient solutions to ensure every project meets the highest standards.
We integrate cutting-edge technology with continuous innovation to develop breakthrough solutions that drive industry progress and create lasting value for our clients.
We offer round-the-clock premium support services, ensuring rapid response and efficient problem resolution, allowing you to focus on your core business without worries.
