The EVG560 automated wafer bonding system is a highly configurable production bonder. Based on the same bond chamber design and incorporating the key features of EVG’s manual bonding systems with enhanced process control and automation, the EVG560 bonder delivers high-yield production bonds. A robot handling system automatically loads and unloads the process chambers.
| Maximum heater size |
|---|
| 150, 200, 300 mm |
| Loading chamber |
|---|
| 5-axis robot |
| Max. bond modules |
|---|
| 4 |
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