The EVG®880 LayerRelease™ System enables nanometer–precision release of bonded, deposited or grown layers from silicon carrier substrates using an infrared (IR) laser coupled with specially formulated inorganic release materials in a proven, high–volume–manufacturing (HVM) capable platform.
The innovative process eliminates the need for glass substrates and organic adhesives overcoming the temperature limitations resulting in front–end process compatibility for ultra–thin layer transfer and downstream processes.
Enabling silicon carriers with inorganic release layers avoids these temperature and glass carrier compatibility issues. In addition, the nanometer precision of IR laser-initiated separation allows for processing extremely thin device wafers without changing processes of record. Subsequent stacking of such thin device layers enables higher–bandwidth interconnects and new opportunities to design and segment dies for next–generation, high–performance devices.
The EVG 880 LayerRelease System is based on the same platform as EVG’s industry–leading EVG®850 series of automated temporary bonding/debonding and silicon–on–insulator (SOI) bonding systems, with a compact design and HVM proven wafer handling system.
Product Features
3D Integration | Scaling Roadmap:
Heterogeneous Integration:
| Wafer diameter (substrate size) |
|---|
| Up to 300 mm |
| Up to 12“ film frame |
| Configuration |
|---|
| Debond module |
| Clean module |
| Film frame mounter |
| Options |
|---|
| ID reading |
| Various output formats |
| High topography wafer handling |
| Warped wafer handling |
By joining hands and leveraging cutting-edge technologies, we develop innovative solutions to drive societal progress and shape a better future.
With deep expertise and extensive experience, we deliver precise and efficient solutions to ensure every project meets the highest standards.
We integrate cutting-edge technology with continuous innovation to develop breakthrough solutions that drive industry progress and create lasting value for our clients.
We offer round-the-clock premium support services, ensuring rapid response and efficient problem resolution, allowing you to focus on your core business without worries.
