Thin-film thickness of samples up to 450mm in diameter are mapped quickly and easily with the F54 advanced spectral reflectance system. The motorized R-Theta stage moves automatically to selected measurement points and provides thickness measurements as fast as two points per second. Autofocus and microscopic spot size are standard features on this advanced spectral reflectance tool.
The F54 can be connected to the user laptop in minutes and be used to provide thickness measurement as fast as two points per second. The system includes dozens of predefined polar, rectangular, or linear map patterns, with the added ability for the user to create their own map pattern with unlimited measurement points.
Automated thin-film thickness mapping of most smooth, non-metallic film layers including:
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