Product Description

The Filmetrics Profilm3D and Filmetrics Profilm3D-200 white light interferometers generate high-resolution measurements of the surface topography with sub-nanometer-level resolution. The tools support both vertical scanning and phase shifting interferometry. Phase Shift Imaging (PSI) can also be combined with WLI to enable PSI sensitivity over larger surface Z variation. Using TotalFocus^® technology, Profilm3D provides stunning 3D natural color images with every pixel in focus. The latest generation of the Profilm3D white light interferometer introduces Enhanced Roughness imaging for measuring rougher surfaces, higher slopes and lower reflectivity surfaces.

In the Profilm3D measurement technique, the vertical resolution of the measurement is independent of the numerical aperture of the objective, enabling high-resolution measurements with a large field of view. The measured area can be further increased by stitching multiple fields of view into a single measurement. The Profilm3D optical profilometer also features a simple, innovative user interface and automated features to support a broad range of working environments, from R&D to production.