FR-Scanner-AIO-Mic-XY200 is a holistic platform for the fully-automated in-depth characterization of patterned single and multilayer coatings on wafers. It provides 200mm of travel along X and Y axes and is suitable for accurate while the measurements sample is secured on the stage through vacuum. The tool is offered in an endless range of optical configurations within the 200-1700nm spectral range.

FR-Scanner-AllInOne-Mic-XY200 integrates under the same roof state-of-the-art optical, electronic, and mechanical modules for the accurate & precise characterization of patterned films. Typical examples include (but are not limited to): micro-patterned surfaces, rough surfaces, and numerous others. The wafer is placed on a vacuum chuck that supports any wafer size up to 200mm diameter and is equipped with reflectance standards. The characterization is performed by a powerful optical module with a spot size as small as a few microns. The motorized XY stage provides travel of 200mm on each axis with unprecedented speed, accuracy & repeatability.