FR-Scanner-AIO-Mic-XY300 is a holistic platform for the fully-automated in-depth characterization of patterned single and multilayer coatings on wafers. It provides true 300mm of travel along X and Y axes and is suitable for accurate measurements while the sample is secured on the stage through vacuum. The tool is offered in a wide range of optical configurations within the 200-1700nm spectral range.

FR-Scanner-AllInOne-Mic-XY300 integrates under the same roof state-of-the-art optical, electronic, and mechanical modules for the accurate & precise characterization of un-patterned and patterned films (e.g. micro-patterned surfaces, rough surfaces, etc.).

The wafer is placed on a vacuum chuck (wafer size with ≤ 300mm diameter) and equipped with reflectance standards. The characterization is performed by a powerful optical module with a spot size as small as a few μm. The motorized XY stage provides 300mm travel on each axis with unprecedented speed, accuracy & repeatability.