FR-Scanner AllInOne: the tool for automatic characterization of films and coatings on wafers, masks or other substrates. FR-Scanner is the ideal tool for the fast, accurate and non-destructive mapping of film properties: thickness, refractive index, uniformity, color etc. Wafers of any diameter (300mm max) and shape can be accommodated on the vacuum chuck.
FR-Scanner-AIO-RΘ150 operates in Polar Coordinates with unparalleled speed and accuracy in both radius & angle. Accurate reflectance data with high repeatability are recorded, making FR-Scanner the ideal tool for at-line and on-line characterization of films on wafers / other substrates at processing facilities.
It is offered in a wide range of configurations for the characterization of films as thin as few nanometers and thick as several hundreds of microns and is accompanied with a dedicated S/W for daily routine use. FR-Scanner provides excellent performance in terms of accuracy, precision, reproducibility and long-term stability.
The FR-Scanner-AIO-RΘ150 platform is offered in a very wide range of implementations covering a wide spectral range (200-1700nm) and thickness range.
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