The 4th generation Film Sense Multi-Wavelength Ellipsometer systems are now available! The primary improvements in this generation are the additional wavelengths and spectral range for the FS-8 model, which further enhance the measurement capabilities over a wide range of thin film applications. The new systems offer the same benefits of the patented* Film Sense ellipsometer technology (long life LED light sources, fast and reliable no moving parts detector, compact design, and web browser software interface), while maintaining ease of use and affordability.
Gen. 4 Common Specifications
The UV wavelength (370 nm) provides enhanced sensitivity when measuring very thin films < 10 nm
The 3 longer wavelengths (735, 850, and 950 nm) enable the measurement of thicker transparent films (up to 5 μm), and absorbing semiconductor films (such as poly-Si, SiGe, amorphous-Si, etc.)
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