Based on a modular platform, the HERCULES combines EVG’s established optical mask alignment technology with integrated wafer cleaning, resist coating, baking and resist development modules. The HERCULES enables cassette-to-cassette processing of various wafer sizes. The HERCULES safely handles thick, highly bowed, rectangular, small-diameter wafers or even device trays. Precision top-side and bottom-side alignment as well as coating of sub-micron to ultra-thick (up to 300 microns) resists can be applied for interlayer and passivation applications. The superior alignment stage design achieves highly accurate alignment and exposure results at high throughput.
| Alignment modes |
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| Top side alignment: ≤ ± 0,5 µm |
| Bottom side alignment: ≤ ± 1,0 µm |
| IR alignment: ≤ ± 2,0 µm/ substrate material depending |
| Advanced alignment features |
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| Manual alignment |
| Automatic alignment |
| Dynamic alignment |
| Alignment offset correction |
| Automatic cross correction / manual cross correction |
| Large gap alignment |
| Industrial automation features |
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| Cassette / SMIF / FOUP / SECS/GEM / thin, bowed, warped, edge wafer handling |
| Exposure source |
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| Mercury light source / UV LED light source |
| Exposure setup |
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| Vacuum contact / hard contact / soft contact / proximity mode / flex mode |
| Wedge compensation |
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| Fully automatic – SW controlled |
| Contactless |
| Exposure options |
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| Interval exposure / flood exposure / sector exposure |
| System control |
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| Operations system: Windows |
| File sharing & back-up solution / unlimited no. recipes & parameters |
| Multi-language user GUI & support: CN, DE, FR, IT, JP, KR |
| Real-time remote access, diagnostics & troubleshooting |
By joining hands and leveraging cutting-edge technologies, we develop innovative solutions to drive societal progress and shape a better future.
With deep expertise and extensive experience, we deliver precise and efficient solutions to ensure every project meets the highest standards.
We integrate cutting-edge technology with continuous innovation to develop breakthrough solutions that drive industry progress and create lasting value for our clients.
We offer round-the-clock premium support services, ensuring rapid response and efficient problem resolution, allowing you to focus on your core business without worries.
