The HERCULES NIL 200mm is the industry standard for nanoimprint lithography in high volume manufacturing. Based on a modular platform, the HERCULES NIL combines EVG’s proprietary SmartNIL imprinting technology with cleaning, resist coating and baking pre-processing steps. The configuration is tunable and adjusted to provide at low cost the best throughput with low footprint. The Hercules NIL is equipped with the state of the art handling systems for most efficient processing on a 200mm platform.

To optimize the process chain, the fabrication of multiple-use soft stamps – which are a cornerstone for high-volume production – is included in the HERCULES NIL without requiring additional imprint stamp manufacturing equipment. The system supports the production of a variety of devices and applications, including optical devices for augmented/virtual reality (AR/VR) headsets, 3D sensors, bio-medical devices, nanophotonics, plasmonics and metasurfaces. By providing a complete NIL solution for high-volume manufacturing, the HERCULES NIL strengthens EVG’s leadership position in full-area NIL equipment solutions.