Key Features Overview
Top loader application suitable for automation (AGV/OHT)
Equipped with a card changer with a highly rigid structure
Auto tilt function can be installed for uniform contact
Reliable temperature control and excellent heat dissipation
Equipped with a strong Z-axis structure and system for powerful probing
Compatible with all types of testers
Constructing a program that allows equipment operation with only basic training
Available for product lines such as Logic, LDI, Memory, DRAM, HBM, etc.
The maximum horizontal size of the tester head that can be docked is ≤900mm. (Assumption that the center of the Tester Head and the center of the Prober Stage are aligned.)
If the size is larger than 900mm, 200mm space can be provided between the stage and loader. (The 200mm size can be changed depending on the tester size.)
| Model Name | KP-300 |
| Wafer Size | 8 & 12inch |
| Dimension | 1,590(W) x 1,790(D) x 1,400(H) mm |
| Probing Area | XY: ±170mm |
| Probing Force | 400Kgf (Option: 800Kgf) |
| Contact Accuracy | ±1.2um or less |
| Temperature | Standard : Room temperature to 150℃ |
| Option : -40℃, Ambient 25℃ |
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