High Accuracy Dimensional Measurement

  Run Out Measurement – straightness, flatness, rotational runout

  Thickness Measurement

  Vibration Measurement

  Surface Profiling

  Alignment

High Resolution Linear Positioning Sensing

  Servo System Feedback – nanopositioning applications

  Feedback for Autofocus Mechanisms

  Feedback for Fast Tool Servo Mechanisms

What is a capacitance sensor?

A capacitance sensor is a device that measures the linear displacement of two parallel plates, one of which is the sensor and the other is the object being measured by the sensor – the target.

Typical Capacitance Sensor

Measurement of Spindle Run Out

• The capacitance probe, or “sensor head”, is a metal or ceramic housing that holds the capacitance sensor which detects the target
• The measuring module, or “gauge board”, contains the sensor drive electronics and provides the analog output of the sensor
• The analog output from the gauge board is typically connected to an A/D card in the customer’s computer

Active and Passive Capacitance Sensors

• Passive sensors are used in most applications. They contain no drive electronics in the probe, and exhibit excellent stability and linearity.
• Active sensors contain a special driver in the probe, and are designed specifically for “high dynamic” applications requiring high resolution and high measurement bandwidth.

Passive Capacitance Probes

Active Capacitance Probes

Custom Probes

• Probes can be customized in a variety of ways –
• Custom probe size or shape to meet customer’s requirements
• Probe tips with angle cuts
• Probes with through hole rather than clamp type mounting
• HIGH STABILITY Option – mates with 4810 high stability gauge option