The nSpec™ CPS includes Nanotronics’ proprietary Artificial In telligence Software, nTelligence™. The platform is highly flexible in its ability to detect defects on a variety of wafers, substrates, and materials. Any defects observed using the system’s various imaging modalities can be labeled and used to train custom er-specific automatic classification models.
Nanotronics’ sophisticated AI adds the ability to not only detect defects but also classify them, helping to assign causality and provide fast feedback to correct the manufacturing process. Tuned for speed and high-quality inference from limited data, the software utilizes customized enhancements for deep learning and convolutional networks.
nSpec™ CPS is the ideal system for fully automated high-vol ume manufacturing environments. User-friendly software makes configuring recipes next to effortless and as needs evolve, recipes are easy to save and modify
Features:
·Automatic wafer handling
· Multiple resolution settings, ranging from 0.3 µm and greater
· Rapid scanning
· Customizable defect reports
· Flexible settings for single image capture and scans
·Variety of sample chucks to meet specific needs and manual loading applications
· Robust analysis for defect or feature of interest detection and classification
· Inspection and review procedures
· Multi-system synchronization
· Small footprint and minimal facilities requirements
· Rack mount controls
· Door interlocks
· Automatic prealignment by notch or flat
· Mapping for wafer presence, cross slot detection, and double stacked wafers
1180 kg
240 cm x 194 cm x 262 cm
-21 in. Hg (-70 kPa)
208—240 VAC, 15A, 50—60 Hz
60 PSI (415 kPa)
Brightfield, Darkfield, Automated DIC (Nomarski)
White light LED (other options available)
5x (included), 1.25x, 2x, 2.5x, 10x, 20x, 50x
5‑position, User‑selectable
350 mm X and Y directions
Linear servo motors with closed‑loop encoders (50 nm resolution)
+/- 2 µm
20 µm
5 kg
SECS/GEM, E-84 Interface
Transmitted light with automated polarizer
12‑position filter wheel
Air Ionizers, Light Curtains
OCR (frontside or backside), Ergonomic cassette loader, Sample specific fixtures, SMIF Pod handling for 150mm & 200mm
N2 Purge Load Port, 200 mm cassette adapter for Load Port
Offline workstation, nTelligence™, Gen‑V‑AI
By joining hands and leveraging cutting-edge technologies, we develop innovative solutions to drive societal progress and shape a better future.
With deep expertise and extensive experience, we deliver precise and efficient solutions to ensure every project meets the highest standards.
We integrate cutting-edge technology with continuous innovation to develop breakthrough solutions that drive industry progress and create lasting value for our clients.
We offer round-the-clock premium support services, ensuring rapid response and efficient problem resolution, allowing you to focus on your core business without worries.
