Defect inspection is crucial to scaling next-generation devices. The LS system has a small footprint and is used to identify, classify, and assign causality to defects before you scale to volume production.
User-friendly software makes configuring recipes simple. As needs evolve, recipes are easily saved and modified.
The nSpec LS can manage various sample form factors and can inspect a wide variety of new and novel materials.
nTelligence is trained to identify early process defects before scaling to high-volume manufacturing.
Easily upgrade the nSpec LS to a PS system when your process is ready to be scaled to volume production.
nSpec LS allows operators to identify, classify, and assign causality to defects in order to prevent down-line issues.
Early detection allows manufacturers to produce high yields and scale processes quickly.
240 kg
165 cm x 157 cm x 194 cm
-21 in. Hg (-70 kPa)
208—240 VAC, 15A, 50—60 Hz
Brightfield, Darkfield, Automated DIC (Nomarski)
White light LED (other options available)
5x (included), 1.25x, 2x, 2.5x, 10x, 20x, 50x
5-position, User‑selectable
200 mm X and Y directions
Linear servo motors with closed‑loop encoders (50 nm resolution)
+/- 0.5 µm
30 µm
2.27 kg
SECS/GEM
Transmitted light with automated polarizer
12‑position filter wheel
Offline workstation, nTelligence™, Gen‑V‑AI
By joining hands and leveraging cutting-edge technologies, we develop innovative solutions to drive societal progress and shape a better future.
With deep expertise and extensive experience, we deliver precise and efficient solutions to ensure every project meets the highest standards.
We integrate cutting-edge technology with continuous innovation to develop breakthrough solutions that drive industry progress and create lasting value for our clients.
We offer round-the-clock premium support services, ensuring rapid response and efficient problem resolution, allowing you to focus on your core business without worries.
