The nSpec PRISM™ includes Nanotronics’ proprietary Artificial Intelligence Software, nTelligence™. The platform is highly flexible in its ability to detect defects on a variety of wafers, substrates, and materials. Any defects observed using the system’s various imaging modalities can be labeled and used to train customer-specific automatic classification models.
Nanotronics’ sophisticated AI adds the ability to not only detect defects but also classify them, helping to assign causality and provide fast feedback to correct the manufacturing process. Tuned for speed and high-quality inference from limited data, the software utilizes customized enhancements for deep learning and convolutional networks
nSpec PRISM™ offers a complete solution for SiC frontend wafer manufacturing from unpolished substrates to epitaxy and device manufacturing. By introducting a new illuminator, Nanotronics can deliver more power to the sample plane. The illuminator enables operators to utilize existing imaging modalities while adding UV and IR Illumination to inspection processes. The system specializes in pairing transmission and PL microscopy for high volume inspection of killer defects such as micropipes and dislocations
Fully automated inspection for:
· Substrate, epi, and patterned wafers
·Transparent and opaque wafers
· Diced wafers on film tape, trays, gel-pak or waffle packs
· Photomasks
· Sample fragments
Features:
·Automatic wafer loader
· Consistent resolution settings, ranging from 0.3 µm and greater
· Rapid scanning
· Customizable defect reports
· Settings for single image capture and scans
·Variety of sample chucks to meet specific needs
· Robust analysis for defect or feature of interest detection and classification
363 kg
236 cm x 157 cm x 194 cm
-21 in. Hg (-70 kPa)
208—240 VAC, 15A, 50—60 Hz
Brightfield, Darkfield, Automated DIC (Nomarski), Ultraviolet Photoluminescence
White light LED, Reflected UV LED (other options available)
5x (included), 1.25x, 2x, 2.5x, 10x, 20x, 50x
5‑position, User‑selectable
200 mm X and Y directions
Linear servo motors with closed‑loop encoders (50 nm resolution)
+/- 0.5 µm
30 µm
2.27 kg
25 wafers / cassette, single Standard H‑Bar
50, 75, 100, 125, 150, and 200 mm
Automatic by notch or flat
SECS/GEM
Transmitted light with automated polarizer
12‑position filter wheel
CleanCube (included)
OCR (frontside or backside), Ergonomic cassette loader, Sample specific fixtures
Offline workstation, nTelligence™
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