The nSpec PRISM™ includes Nanotronics’ proprietary Artificial Intelligence Software, nTelligence™. The platform is highly flexible in its ability to detect defects on a variety of wafers, substrates, and materials. Any defects observed using the system’s various imaging modalities can be labeled and used to train customer-specific automatic classification models.
Nanotronics’ sophisticated AI adds the ability to not only detect defects but also classify them, helping to assign causality and provide fast feedback to correct the manufacturing process. Tuned for speed and high-quality inference from limited data, the software utilizes customized enhancements for deep learning and convolutional networks
nSpec PRISM™ offers a complete solution for SiC frontend wafer manufacturing from unpolished substrates to epitaxy and device manufacturing. By introducting a new illuminator, Nanotronics can deliver more power to the sample plane. The illuminator enables operators to utilize existing imaging modalities while adding UV and IR Illumination to inspection processes. The system specializes in pairing transmission and PL microscopy for high volume inspection of killer defects such as micropipes and dislocations
Weight
363 kg
Dimensions (W x D x H)
236 cm x 157 cm x 194 cm
Min. Vacuum Requirement
-21 in. Hg (-70 kPa)
Power Supply
208—240 VAC, 15A, 50—60 Hz
Illumination Modes
Brightfield, Darkfield, Automated DIC (Nomarski), Ultraviolet Photoluminescence
Light Source
White light LED, Reflected UV LED (other options available)
Objectives
5x (included), 1.25x, 2x, 2.5x, 10x, 20x, 50x
Objective Turret
5‑position, User‑selectable
Travel, typical
200 mm X and Y directions
Positioning
Linear servo motors with closed‑loop encoders (50 nm resolution)
Repeatability
+/- 0.5 µm
Travel Flatness
30 µm
Centered Load Capacity
2.27 kg
Cassette
25 wafers / cassette, single Standard H‑Bar
Standard Wafer Sizes
50, 75, 100, 125, 150, and 200 mm
Wafer Alignment
Automatic by notch or flat
Supported Protocols
SECS/GEM
Illumination
Transmitted light with automated polarizer
Filters
12‑position filter wheel
Enclosure
CleanCube (included)
Handling
OCR (frontside or backside), Ergonomic cassette loader, Sample specific fixtures
Machine learning
Offline workstation, nTelligence™
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