The nSpec PS is highly flexible and detects defects on a variety of wafers, substrates, and materials.
nSpec PS allows operators to identify, classify, and assign causality to defects in order to prevent down-line issues.
Early detection allows manufacturers to produce high yields and scale processes quickly.
User-friendly software makes configuring recipes simple. As needs evolve, recipes are easily saved and modified.
The nSpec PS can manage various sample form factors and uses Nanotronics’ custom illuminator to inspect a wide range of materials.
nTelligence is trained to identify early process defects before scaling to high-volume manufacturing.
Upgrade the nSpec PS to include CleanCube, a modular clean environment that protects components from contaminants.
363 kg
236 cm x 157 cm x 194 cm
-21 in. Hg (-70 kPa)
208—240 VAC, 15A, 50—60 Hz
Brightfield, Darkfield, Automated DIC (Nomarski)
White light LED, (other options available)
5x (included), 1.25x, 2x, 2.5x, 10x, 20x, 50x
5-position, User‑selectable
200 mm X and Y direction
Linear servo motors with closed‑loop encoders (50 nm resolution)
+/- 0.5 µm
30 µm
2.27 kg
25 wafers / cassette, single Standard H-Bar
50, 75, 100, 125, 150, and 200 mm
Automatic by notch or flat
SECS/GEM
Transmitted light with automated polarizer
12‑position filter wheel
CleanCube
OCR (frontside or backside), Ergonomic cassette loader, Sample specific fixtures
Offline workstation, nTelligence™
By joining hands and leveraging cutting-edge technologies, we develop innovative solutions to drive societal progress and shape a better future.
With deep expertise and extensive experience, we deliver precise and efficient solutions to ensure every project meets the highest standards.
We integrate cutting-edge technology with continuous innovation to develop breakthrough solutions that drive industry progress and create lasting value for our clients.
We offer round-the-clock premium support services, ensuring rapid response and efficient problem resolution, allowing you to focus on your core business without worries.
