The nSpec™ TURBO includes Nanotronics’ proprietary Artificial Intelligence Software, nTelligence™. The platform is highly flexible in its ability to detect defects on a variety of wafers, substrates, and materials. Any defects observed using the system’s various imaging modalities can be labeled and used to train customer-specific automatic classification models.
Nanotronics’ sophisticated AI adds the ability to not only detect defects but also classify them, helping to assign causality and provide fast feedback to correct the manufacturing process. Tuned for speed and high-quality inference from limited data, the software utilizes customized enhancements for deep learning and convolutional networks
nSpec™ TURBO matches all the capabilities of the nSpec™ product lines with scanning speeds three times faster. nSpec™ TURBO is the ideal system for fully automated high-volume manufacturing environments. User-friendly software makes configuring recipes next to effortless and as needs evolve, recipes are easy to save and modify.
Weight
1200 kg
Dimensions (W x D x H)
240 cm x 194 cm x 262 cm
Min. Vacuum Requirement
-21 in. Hg (-70 kPa)
Power Supply
208—240 VAC, 15A, 50—60 Hz
Min. Clean Dry Air
60 PSI (415 kPa)
Illumination Modes
Brightfield, Darkfield, Automated DIC (Nomarski)
Light Source
White light LED (other options available)
Objectives
5x (included), 1.25x, 2x, 2.5x, 10x, 20x, 50x
Objective Turret
5‑position, User‑selectable
Travel, typical
350 mm X and Y directions
Positioning
Linear servo motors with closed‑loop encoders (50 nm resolution)
Repeatability
+/- 2 µm
Travel Flatness
20 µm
Centered Load Capacity
12.5 kg
Supported Protocols
SECS/GEM, E-84 Interface
Illumination
Transmitted light with automated polarizer
Filters
12‑position filter wheel
Enclosure
CleanCube, Light Curtains
Handling
OCR (frontside or backside), Ergonomic cassette loader, Sample specific fixtures
Load Port
N2 Purge Load Port, 200 mm cassette adapter for Load Port
Machine learning
Offline workstation, nTelligence™, Gen‑V‑AI
By joining hands and leveraging cutting-edge technologies, we develop innovative solutions to drive societal progress and shape a better future.
With deep expertise and extensive experience, we deliver precise and efficient solutions to ensure every project meets the highest standards.
We integrate cutting-edge technology with continuous innovation to develop breakthrough solutions that drive industry progress and create lasting value for our clients.
We offer round-the-clock premium support services, ensuring rapid response and efficient problem resolution, allowing you to focus on your core business without worries.
