Bench-Top, High-Speed, High-Accuracy, Non-Contact 4D Surface & Thick-Film Profiler
Combining a single-point, visible-light, spectral-domain optical coherence tomography (SD-OCT) sensor with a high-speed, nanometer-encoded X/Y/Z motion-control stage, the QuickPRO-OCT™ can capture the plane of each layer within transparent film samples in a single measurement, at up to 66 kHz. The QuickPRO-OCT™ penetration depth (up to 100µm) and axial resolution (5nm) is optimized for the measurement of multi-layer transparent films, flat substrates, and functional layers in the semi-conductor, life science and pharmaceutical industries.
SYSTEM CHARACTERISTICS
Compact, bench-top unit with environmental enclosure
Single-point, non-contact, visible-light, Spectral-Domain Optical Coherence Tomography (SD-OCT) sensor with up to 66 kHz measuring rate
Optimized for measuring topography and thickness of multi-layer transparent films on highly reflective material
Nanometer encoded X/Y/Z motion with magnetic linear motors and cross roller bearings for fast raster or spiral scanning over 100mm (X), 100mm (Y), 50mm (Z)
Available vacuum chucks for sample and tray holding
User-friendly CalcuSurf-4D™ recipe generation, data acquisition, surface topography and multi-layer film analysis software permits optimized measurement sampling density for best coverage at highest throughput
APPLICATIONS
An ideal application for the QuickPRO-OCT™ is the measurement of patterned photoresist (or similar transparent coatings) on a silicon, GaAs or glass wafer for backend semiconductor, advanced packaging, display, LED, VCSEL and MEMS as a quality control post-develop and pre-etch.
By joining hands and leveraging cutting-edge technologies, we develop innovative solutions to drive societal progress and shape a better future.
With deep expertise and extensive experience, we deliver precise and efficient solutions to ensure every project meets the highest standards.
We integrate cutting-edge technology with continuous innovation to develop breakthrough solutions that drive industry progress and create lasting value for our clients.
We offer round-the-clock premium support services, ensuring rapid response and efficient problem resolution, allowing you to focus on your core business without worries.
