System Characteristics
Designed specifically for measuring the surface topography and transparent film thickness of rotationally symmetric samples such as diamond-tuned optical surfaces and molded or polished aspheric lenses.
Two size options: RPS-150 for Ф ≤ 150 mm samples and RPS-300 for Ф ≤ 300 mm samples
Non-contact, high-resolution, high-speed chromatic confocal point sensor with three available probe resolutions
Integrated high-precision centration/tilt table with adjustable piezo lever probe for fast and easy sample/chuck/fixture alignment
Nanometer encoded C/R/Z (rotational, radial, vertical) motion with direct drive rotary air bearing (C-axis) and direct drive linear mechanical bearing (R- & Z-axis)
Granite base with dimensionally stable Invar metrology frame
Available vacuum bell chucks for secure sample holding
Nanometer precision motion control with thermal compensation and error mapped Invar encoder gating scales
User-friendly QuickPRO™ instrument control and data acquisition software permits easy set-up and optimized measurement sampling density for best coverage at highest throughput
Powerful CalcuSurf-3D™ surface plotting, form fitting and data reporting software
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